The Taiyan TKP-500W fully automated wafer plasma cleaning and etching system is primarily designed for wafer surface cleaning and pretreatment, offering compatibility with 6-inch, 8-inch, and 12-inch wafers simultaneously. The CORONA-500W system consists mainly of 6/8/12-inch wafer loading ports, a dual-arm wafer robot, an aligner, and a vacuum chamber module. It provides effective solutions for processes such as resist stripping and via cleaning, enhancing wafer adhesion, removing metal oxides, and relieving wafer stress.