New optical module, suitable for products with significant warping following thinning, debonding or coating.
Compatible with manual and automated loading/unloading and sorting systems.
Supports detailed analysis or rapid comprehensive inspection.
New optical module, suitable for products with significant warping following thinning, debonding or coating.
Compatible with manual and automated loading/unloading and sorting systems.
Supports detailed analysis or rapid comprehensive inspection.
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TKP-V Series Specification Sheet |
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Sample Size |
4/6 or 6/8 or 8/12 inches |
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Test specimen material |
Si/SiC/GaAs/GaN/InP/Glass/Sapphire etc |
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Test range |
100–300 mm |
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Workpiece warpage |
>5 mm, (25°) |
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External dimensions |
1350 × 1800 × 1900 mm |
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Measurement functions |
TTV, LTV, BOW, WARP, Thickness, Stress |
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Vibration isolation system |
Suspension-type vibration isolation system, air-cushion type |