Capable of measuring various semiconductor materials; capable of measuring product height, dimensions, thickness, flatness, warpage and coplanarity.
Capable of measuring various semiconductor materials; capable of measuring product height, dimensions, thickness, flatness, warpage and coplanarity.
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TKP-D Series Specification Table |
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Inspection Object Dimensions |
300mm x 300mm |
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Inspection Object Material |
Metal, plastic, transparent and semi-transparent objects, etc |
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Selectable magnification |
21X–250X |
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Horizontal field of view |
100mm–2mm |
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External dimensions |
1000 × 1000 × 1500 mm |
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Zoom ratio |
1/2/3/4x |
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Control system |
Bus-based control system |